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Product/Service Catalog

Vacuum Motors

Model: ULV Series

Tecnotion

A direct sibling of our U-series, these vacuum rated ironless motors feature specifically designed coil units and magnet yokes for use in high vacuum, down to 10-8 mBar. 

Apart from the features carried over from our regular ironless motors: light weight and ultra precision, this series is also capable of incredibly smooth motion and achieves the lowest amount of outgassing possible for a series product of this type. The importance of low outgassing can be so crucial for certain applications, that we had this thoroughly tested and can even supply you with exact specifications and performance details, should you so desire.

ULV SERIES - FP 720N .. FC 150N
 

The ULV coils are the high end coils in the vacuum rated linear motor series. The ULV series is commonly used for applications demanding peak force or low heat output. In longer strokes ULV coils can be combined to save magnet material but still achieve high performance.

Thermal management is one of the main challenges in vacuum. Therefore the coil units have been designed to achieve a low thermal resistance (Rth) to enable the coil unit to quickly conduct heat away from the coil. Integrated temperature and cut-off sensors guarantee thermal protection at all times.

KEY INDUSTRIES THAT CAN BENEFIT FROM THESE MOTORS ARE, FOR INSTANCE:

  • Semiconductor
  • Flat Panel Display
  • Inspection stages
  • Lithography
  • E-beam / ion beam applications

SO WHY CHOOSE FOR IRONLESS VACUUM RATED?

  • Defined low outgassing
  • No particulation
  • High cleanliness
  • No large cable feed-through required 
  • Can be positioned anywhere in the vacuum chamber.


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