Hybrid Linear Positioning Stage, Ultra High Precision by PI

PI (Physik Instrumente) LP Posted 06/07/2019

Hybrid actuation based on a combination of piezo (or voice coil) and motorized / ballscrew drives overcomes the limitations of each of these technologies. The result is long-travel, ultra-smooth, high resolution motion, with exceptional tracking accuracy. 1 nanometer tracking accuracy of a moving position target has been achieved.